v3-S29. Course Description:
This course explores the critical role of metrology and process control in semiconductor manufacturing. Participants will learn how advanced measurement, inspection, analysis, and control techniques ensure process precision, yield improvement, and device reliability at the nanoscale. Key topics include dimensional and material metrology, statistical control methods, AI-enhanced inspection, and emerging technologies like quantum metrology and digital twins. Through real-world applications and industry metrics, learners will gain the skills needed to monitor, optimize, and innovate within increasingly complex semiconductor process flows.